In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon-Reference-Cited by-同舟云学术

In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon

Published:2017-09-29 Issue:10 Volume:11 Page:639-645
ISSN:1749-4885
Container-title:Nature Photonics
language:en
Short-container-title:Nature Photon

Author:

Tokel Onur^ORCID,Turnalı Ahmet,Makey Ghaith^ORCID,Elahi Parviz,Çolakoğlu Tahir,Ergeçen Emre,Yavuz Özgün,Hübner René,Zolfaghari Borra Mona,Pavlov Ihor,Bek Alpan^ORCID,Turan Raşit,Kesim Denizhan Koray,Tozburun Serhat,Ilday Serim,Ilday F. Ömer^ORCID

Publisher

Springer Science and Business Media LLC

Subject

Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

http://www.nature.com/articles/s41566-017-0004-4.pdf

Reference31 articles.

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3. Lim, A. E.-J. et al. Review of silicon photonics foundry efforts. IEEE J. Sel. Top. Quantum Electron. 20, 405–416 (2014).

4. Soref, R. Mid-infrared photonics in silicon and germanium. Nat. Photon. 4, 495–497 (2010).

5. Emma, P. G. & Kursun, E. Is 3D chip technology the next growth engine for performance improvement? IBM J. Res. Dev. 52, 541–552 (2008).

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