The pressure sensitivity of wrinkled B-doped nanocrystalline diamond membranes
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/srep35667.pdf
Reference50 articles.
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3. Riedrich-Möller, J. et al. One- and two-dimensional photonic crystal microcavities in single crystal diamond. Nat. Nanotechnol. 7, 69–74 (2012).
4. Fragiacomo, G., Reck, K., Lorenzen, L. & Thomsen, E. V. Novel designs for application specific MEMS pressure sensors. Sensors (Basel). 10, 9541–9563 (2010).
5. Pramanik, C., Saha, H. & Gangopadhyay, U. Design optimization of a high performance silicon MEMS piezoresistive pressure sensor for biomedical applications. J. Micromechanics Microengineering 16, 2060–2066 (2006).
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