Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer-Reference-Cited by-同舟云学术

Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer

Published:2022-10-27 Issue:4 Volume:220 Page:2200309
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Physica Status Solidi (a)

Author:

Bähr Mario¹^ORCID,Käpplinger Indira¹,Pobedinskas Paulius²³^ORCID,Frank Thomas¹,Grün André¹,Haenen Ken²³,Ortlepp Thomas¹

Affiliation:

1. CiS Forschungsinstitut für Mikrosensorik GmbH Konrad-Zuse-Str. 14 99099 Erfurt Germany

2. Institute for Materials Research (IMO) Hasselt University Wetenschapspark 1 3590 Diepenbeek Belgium

3. IMOMEC IMEC vzw Wetenschapspark 1 3590 Diepenbeek Belgium

Funder

Bundesministerium für Wirtschaft und Technologie

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssa.202200309

Reference23 articles.

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2. A. A.Barlian R.Narain J. T.Li C. E.Quance A. C.Ho V.Mukundan B. L.Pruitt 19th IEEE Int. Conf. on Micro Electro Mechanical Systems IEEE Piscataway NJ2006 pp.626–629 https://doi.org/10.1109/MEMSYS.2006.1627877.

3. Carbon-based Nanomaterials and Hybrids

4. Inkjet-Printed High-Q Nanocrystalline Diamond Resonators

5. J.Zalieckas I. R.Mondragon P.Pobedinskas A. S.Kristoffersen S.Mohamed-Ahmed C.Gjerde P. J.Høl G.Hallan O. N.Furnes M.-R.Cimpan K.Haenen B.Holst M. M.Greve Polycrystalline Diamond Coating on Orthopaedic Implants: Realization and Role of Surface Topology and Chemistry in Adsorption of Proteins and Cell Proliferation 2022.

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