Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/srep40091.pdf
Reference30 articles.
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4. Shi, Y. M. et al. Synthesis of few-layer hexagonal boron nitride thin film by chemical vapor deposition. Nano Lett. 10, 4134–4139 (2010).
5. Caneva, S. et al. Nucleation control for large, single crystalline domains of mono layer hexagonal boron nitride via Si-doped Fe catalysts. Nano Lett. 15, 1867–1875 (2015).
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