Achieving unlimited recording length in interference lithography via broad-beam scanning exposure with self-referencing alignment
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/s41598-017-01099-3.pdf
Reference22 articles.
1. Wise, S. et al. Phase effects in the diffraction of light: beyond the grating equation. Phys. Rev. Lett. 95, 013901, doi: 10.1103/PhysRevLett.95.013901 (2005).
2. Barnes, S. I. et al. The optical design of the Southern African Large Telescope High Resolution Spectrograph: SALT HRS. Proc. SPIE 7014, 70140K, doi: 10.1117/12.788219 (2008).
3. Strickland, D. & Mourou, G. Compression of amplified chirped optical pulses. Opt. Commun. 56, 219–221, doi: 10.1016/0030-4018(85)90120-8 (1985).
4. Zuegel, J. D. et al. Laser challenges for fast ignition. Fusion Sci. Technol. 49, 453–482 (2006).
5. Bonod, N. & Neauport, J. Diffraction gratings: from principles to applications in high-intensity lasers. Adv. Opt. Photonics 8, 156–199, doi: 10.1364/AOP.8.000156 (2016).
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