Ultrahigh-Q optomechanical crystal cavities fabricated in a CMOS foundry
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/s41598-017-02515-4.pdf
Reference27 articles.
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2. Lin, S. Y. et al. A three-dimensional photonic crystal operating at infrared wavelengths. Nature 394, 251–253, doi: 10.1038/28343 (1998).
3. Sekoguchi, H., Takahashi, Y., Asano, T. & Noda, S. Photonic crystal nanocavity with a Q-factor of 9 million. Optics Express 22, 916–924, doi: 10.1364/OE.22.000916 (2014).
4. Song, B.-S., Noda, S., Asano, T. & Akahane, Y. Ultra-high-Q photonic double-heterostructure nanocavity. Nature Materials 4, 207–210, doi: 10.1038/nmat1320 (2005).
5. Debnath, K. et al. Highly efficient optical filter based on vertically coupled photonic crystal cavity and bus waveguide. Optics letters 38, 154–156, doi: 10.1364/OL.38.000154 (2013).
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