Abstract
AbstractIn this study, a numerical model of the plasma expansion on a droplet surface based on the initial plasma method was proposed. The initial plasma was obtained through the pressure inlet boundary condition, and the effect of ambient pressure on the initial plasma and adiabatic expansion of the plasma on the droplet surface, including the effect on the velocity and temperature distribution, were investigated. The simulation results showed that the ambient pressure decreased, leading to an increase in the expansion rate and temperature, and therefore a larger plasma size was formed. Plasma expansion creates a backward driving force and eventually envelops the entire droplet, indicating a significant difference compared to planar targets.
Funder
National Natural Science Foundation of China
Fundamental Research Funds for the Central Universities
Publisher
Springer Science and Business Media LLC
Reference43 articles.
1. Scheers, J. et al. Time- and space-resolved optical stark spectroscopy in the afterglow of laser-produced tin-droplet plasma. Phys. Rev. E. 102, 13204 (2020).
2. Giovannini, A. Z., Gambino, N., Rollinger, B. & Abhari, R. S. Angular ion species distribution in droplet-based laser-produced plasmas. J. Appl. Phys. 117, 33302 (2015).
3. Hori, T. et al. 100W Euv Light-Source Key Component Technology Update for Hvm 977625 (SPIE, 2016).
4. Yanagida, T. et al. Characterization and Optimization of Tin Particle Mitigation and Euv Conversion Efficiency in a Laser Produced Plasma Euv Light Source 79692T (SPIE, 2011).
5. Kawasuji, Y. et al. Key Components Technology Update of the 250W High-Power Lpp-Euv Light Source 101432G (SPIE, 2017).
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