Author:
Kim Bogyu,Jeon Young-Uk,Lee Chulwoo,Kim In Soo,Lee Byeong-Hyeon,Kim Young-Hwan,Kim Young Duck,Han Il Ki,Lee Kwanil,Kim Jongbum,Kang JoonHyun
Abstract
AbstractIn this study, we experimentally demonstrate fabrication of ultra-smooth and crystalline barium titanate (BTO) films on magnesium oxide (MgO) substrates by engineering lattice strain and crystal structure via thermal treatment. We observe that oxygen-depleted deposition allows growth of highly strained BTO films on MgO substrates with crack-free surface. In addition, post-thermal treatment relaxes strain, resulting in an enhancement of ferroelectricity. Surface roughening of the BTO films caused by recrystallization during post-thermal treatment is controlled by chemical–mechanical polishing (CMP) to retain their initial ultra-smooth surfaces. From Raman spectroscopy, reciprocal space map (RSM), and capacitance–voltage (C–V) curve measurements, we confirm that the ferroelectricity of BTO films strongly depend on the relaxation of lattice strain and the phase transition from a-axis to c-axis oriented crystal structure.
Funder
Institute for Information and Communications Technology Promotion
Korea Institute of Science and Technology
Publisher
Springer Science and Business Media LLC
Cited by
2 articles.
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