Nanophotonic identification of defects buried in three-dimensional NAND flash memory devices

Author:

Yoon Jae Woong,Ma Seong-MinORCID,Kim Gun Pyo,Kang Yoonshik,Hahn JoonseongORCID,Kwon Oh-Jang,Kim Kyuyoung,Song Seok Ho

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Instrumentation,Electronic, Optical and Magnetic Materials

Reference33 articles.

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3. Ebbesen, T. W., Lezec, H. J., Ghaemi, H. F., Thio, T. & Wolff, P. A. Extraordinary optical transmission through sub-wavelength hole arrays. Nature 391, 667–669 (1998).

4. Garcia-Vidal, F. J., Martin-Moreno, L., Ebbesen, T. W. & Kuipers, L. Light passing through subwavelength apertures. Rev. Mod. Phys. 82, 729 (2010).

5. Yoon, J. W., Lee, J. H., Song, S. H. & Magnusson, R. Unified theory of surface-plasmonic enhancement and extinction of light transmission through metallic nanoslit arrays. Sci. Rep. 4, 5683 (2014).

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