Fabrication of 3D air-core MEMS inductors for very-high-frequency power conversions

Author:

Le Hoa Thanh,Mizushima Io,Nour Yasser,Tang Peter Torben,Knott Arnold,Ouyang Ziwei,Jensen Flemming,Han AnpanORCID

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Materials Science (miscellaneous),Atomic and Molecular Physics, and Optics

Reference46 articles.

1. Yao JJ . RF MEMS from a device perspective. Journal of Micromechanics and Microengineering 2000; 10: 9–38.

2. Yoon JB, Kim BK, Han CH et al. Surface micromachined solenoid on-Si and on-glass inductors for RF applications. IEEE Electron Device Letters 1999; 20: 487–489.

3. Kral A, Behbahani F, Abidi AA RF-CMOS oscillators with switched tuning. Proceedings of the IEEE in Custom Integrated Circuits Conference; Santa Clara, CA; 1998: 555-558.

4. Young DH, Malba V, Ou JJ et al. A low-noise RF voltage-controlled oscillator using on-chip high-Q three dimensional coil inductor and micromachined variable capacitor. Proceedings of the Solid-State Sensor and Actuator Workshop; Cleveland, OH, USA; 1998: 128-131.

5. Ahn CH, Allen MG . A planar micromachined spiral inductor for integrated magnetic microactuator applications. Journal of Micromechanics Microengineering 1999; 3: 37–44.

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