Funder
National Natural Science Foundation of China
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Materials Science (miscellaneous),Atomic and Molecular Physics, and Optics
Reference39 articles.
1. Challoner, A. D., Ge, H. H. & Liu, J. Y. Boeing disc resonator gyroscope. In 2014 IEEE/ION Position, Location and Navigation Symposium (PLANS 2014); 5–8 May 2014; 504–514 (Monterey, CA, 2014).
2. Senkal, D. et al. 100k Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process. In IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS 2014); 26–30 Jan 2014, 24–27 (2014).
3. Su, T. H. et al. Silicon MEMS disk resonator gyroscope with an integrated CMOS analog front-end. Ieee. Sens. J. 14, 3426–3432 (2014).
4. Nitzan, S. H. et al. Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope. Sci. Rep. 5, 9036 (2015).
5. Ahn, C. H. et al. Encapsulated disk resonator gyroscope with differential internal electrodes. In IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS 2016); 24–28 Jan 2016; 962–965 (Shanghai, 2016).
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