Author:
Liu Zhaojun,Tian Bian,Zhang Bingfei,Liu Jiangjiang,Zhang Zhongkai,Wang Song,Luo Yunyun,Zhao Libo,Shi Peng,Lin Qijing,Jiang Zhuangde
Abstract
AbstractAccurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achieve in situ real-time temperature measurements. The stability and reliability of the sensor are greatly improved by optimizing the process parameters, structural design, and preparation methods. A novel micro-three-dimensional structure with better malleability is designed, which also takes advantage of the fast response of a two-dimensional thin film. The as-obtained flexible temperature sensor with excellent stability and reliability is expected to greatly contribute to the development of essential components in various emerging research fields, including bio-robot and healthcare systems. The model of the application sensor in a mask is further proposed and designed to realize the collection of health information, reducing the number of deaths caused by the lack of timely detection and treatment of patients.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Materials Science (miscellaneous),Atomic and Molecular Physics, and Optics
Reference35 articles.
1. Liu, H., Sun, W., Chen, Q. & Xu, S. Thin-film thermocouple array for time-resolved local temperature mapping. IEEE Electron Device Lett. 32, 1606–1608 (2011).
2. Qiao, L., Zhang, L., Tao, X. & Ding, X. Review of flexible temperature sensing networks for wearable physiological monitoring. Adv. Healthc. Mater. 6, 1601371 (2017).
3. Shin, J. et al. Sensitive wearable temperature sensor with seamless monolithic integration. Adv. Mater. 32, 1905527.1–1905527.9 (2020).
4. Wang, S. et al. Skin electronics from scalable fabrication of an intrinsically stretchable transistor array. Nature 555, 83–88 (2018).
5. Boutry, C. M., Negre, M., Jorda, M., Vardoulis, O. & Bao, Z. A hierarchically patterned, bioinspired e-skin able to detect the direction of applied pressure for robotics. Sci. Robot. 3, 6914- (2018).
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