Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Physics and Astronomy,General Biochemistry, Genetics and Molecular Biology,General Chemistry
Link
http://www.nature.com/articles/ncomms12701.pdf
Reference21 articles.
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4. Leamy, H. J. Charge collection scanning electron microscopy. J. Appl. Phys. 53, R51 (1982).
5. Cole, E. I. Jr Techniques for localization of IC interconnection defects. Mater. Res. Soc. Symp. Proc. 716, B13.1.1–12 (2002).
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