Multiway Gaussian Mixture Model Based Multiphase Batch Process Monitoring-Reference-Cited by-同舟云学术

Multiway Gaussian Mixture Model Based Multiphase Batch Process Monitoring

Published:2009-08-03 Issue:18 Volume:48 Page:8585-8594
ISSN:0888-5885
Container-title:Industrial & Engineering Chemistry Research
language:en
Short-container-title:Ind. Eng. Chem. Res.

Author:

Yu Jie¹,Qin S. Joe¹

Affiliation:

1. Department of Chemical Engineering The University of Texas at Austin, Austin, Texas 78712, and The Mork Family Department of Chemical Engineering and Materials Science, Ming Hsieh Department of Electrical Engineering, Daniel J. Epstein Department of Industrial and Systems Engineering, University of Southern California, Los Angeles, California 90089

Publisher

American Chemical Society (ACS)

Subject

Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/ie900479g

Reference30 articles.

1. A comparison of principal component analysis, multiway principal component analysis, trilinear decomposition and parallel factor analysis for fault detection in a semiconductor etch process

2. Fault detection of plasma etchers using optical emission spectra

3. Fault Detection and Diagnosis in an Industrial Fed-Batch Cell Culture Process

4. Online monitoring of multi-phase batch processes using phase-based multivariate statistical process control

5. Monitoring batch processes using multiway principal component analysis

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