Low-Temperature Fabrication of Si Thin-Film Transistor Microstructures by Soft Lithographic Patterning on Curved and Planar Substrates-Reference-Cited by-同舟云学术

Low-Temperature Fabrication of Si Thin-Film Transistor Microstructures by Soft Lithographic Patterning on Curved and Planar Substrates

Published:2000-10-11 Issue:11 Volume:12 Page:3306-3315
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Erhardt Martin K.¹,Jin Hyun-Chul¹,Abelson John R.¹,Nuzzo Ralph G.¹

Affiliation:

1. Department of Chemistry, Department of Materials Science and Engineering, and the Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana−Champaign, Urbana, Illinois 61801

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm000480t

Reference49 articles.

1. Polymer microstructures formed by moulding in capillaries

2. Micromolding of Polymers in Capillaries: Applications in Microfabrication

3. Soft Lithography

4. Fabrication of Silicon MOSFETs Using Soft Lithography

5. Using soft lithography to fabricate GaAs/AlGaAs heterostructure field effect transistors

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