Author:
Kim Enoch,Xia Younan,Whitesides George M.
Publisher
Springer Science and Business Media LLC
Reference17 articles.
1. Moreau, W. M. Semiconductor Lithography: Principles and Materials (Plenum, New York, 1988).
2. Haverkorn van Rijsewijk, H. C., Legierse, P. E. J. & Thomas, G. E. Philips tech. Rev. 40, 287–297 (1982).
3. Palmer, C. Spectroscopy 102, 14–15 (1995).
4. Martin, C. M. Accts Chem. Res. 28, 61–68 (1995).
5. Kumar, A. & Whitesides, G. M. Appl. Phys. Lett. 63, 2002–2004 (1993).
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