Energy Recovery Efficiency and Cost Analysis of VOC Thermal Oxidation Pollution Control Technology
Author:
Affiliation:
1. Institute of Mechanical and Electrical Engineering, National Taipei University of Technology, Taipei 10608, Taiwan
Publisher
American Chemical Society (ACS)
Subject
Environmental Chemistry,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/es900626e
Reference11 articles.
1. Development of Parametric Material, Energy, and Emission Inventories for Wafer Fabrication in the Semiconductor Industry
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4. On the design of the RTO unit using CFD
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