Shadow Overlap Ion-beam Lithography for Nanoarchitectures
Author:
Affiliation:
1. Biomolecular Nanotechnology Center, Berkeley Sensor and Actuator Center, Department of Bioengineering, University of California at Berkeley, Berkeley, California 94720
Publisher
American Chemical Society (ACS)
Subject
Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering
Link
https://pubs.acs.org/doi/pdf/10.1021/nl901911p
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