Reaction of Methylcyclopentadienyl Manganese Tricarbonyl on Silicon Oxide Surfaces: Implications for Thin Film Atomic Layer Depositions
Author:
Affiliation:
1. Department of Chemistry, University of California, Riverside, California 92521, United States
Funder
U.S. Department of Energy
Publisher
American Chemical Society (ACS)
Subject
Inorganic Chemistry,Organic Chemistry,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/om5006269
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