Pyrolysis of Alucone Molecular Layer Deposition Films Studied Using In Situ Transmission Fourier Transform Infrared Spectroscopy
Author:
Affiliation:
1. Department of Chemistry and Biochemistry and ‡Department of Mechanical Engineering, University of Colorado at Boulder, 215 UCB, Boulder, Colorado 80309, United States
Funder
Division of Chemistry
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/jp512074n
Reference67 articles.
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5. Metalcones: Hybrid Organic–Inorganic Films Fabricated Using Atomic and Molecular Layer Deposition Techniques
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