1. Center for Micro Nano Systems, School of Information Science and Technology (SIST), Fudan University, Shanghai 200433, P. R. China
2. Center for High Pressure Science and Technology Advanced Research, Shanghai 201203, China
3. State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, No.500 Yutian Road, Shanghai 200083, China
4. Frontier Institute of Chip and System, Fudan University, Shanghai 200433, China
5. Shanghai Frontier Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University, 2005 Songhu Road, Shanghai 200438, P. R. China