Armored Nanocones Engraved by Selective Laser Doping Enhanced Plasma Etching for Robust Supertransmissivity-Reference-Cited by-同舟云学术

Armored Nanocones Engraved by Selective Laser Doping Enhanced Plasma Etching for Robust Supertransmissivity

Author:

Xu Kang¹^ORCID,Hu Jin¹^ORCID,Wang Min²^ORCID,Cheng Gary J.³^ORCID,Xu Shaolin¹^ORCID

Affiliation:

1. Department of Mechanical and Energy Engineering, Southern University of Science and Technology, Shenzhen 518055, China

2. School of Microelectronics, Southern University of Science and Technology, Shenzhen 518055, China

3. School of Industrial Engineering, Purdue University, West Lafayette, Indiana 47907, United States

Funder

Science, Technology and Innovation Commission of Shenzhen Municipality

Guangdong Provincial University Science and Technology Program

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

Reference31 articles.

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