Seed-guided high-repetition-rate femtosecond laser oxidation for functional three-dimensional silicon structure fabrication-Reference-Cited by-同舟云学术

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Seed-guided high-repetition-rate femtosecond laser oxidation for functional three-dimensional silicon structure fabrication

Published:2024-12 Issue: Volume:179 Page:111348
ISSN:0030-3992
Container-title:Optics & Laser Technology
language:en
Short-container-title:Optics & Laser Technology

Author:

Yin Jingbo,Hong Minghui^ORCID

Publisher

Elsevier BV

Reference41 articles.

1. Nanostructure and Microstructure Fabrication: From Desired Properties to Suitable Processes;Van Assenbergh;Small,2018

2. Microcomb-driven silicon photonic systems;Shu;Nature,2022

3. High-efficiency, large-area, topology-optimized metasurfaces;Phan;Light Sci. Appl.,2019

4. Versatile silicon-waveguide supercontinuum for coherent mid-infrared spectroscopy;Nader;APL Photonics,2018

5. Silicon nanostructures for photonics and photovoltaics;Priolo;Nat. Nanotechnol.,2014

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Formation of Armored Silicon Nanowires Array via High-Repetition-Rate Femtosecond Laser Oxidation for Robust Surface-Enhanced Raman Scattering Detection;ACS Applied Materials & Interfaces;2024-08-31

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