Dip-In Photoresist for Photoinhibited Two-Photon Lithography to Realize High-Precision Direct Laser Writing on Wafer
Author:
Affiliation:
1. Research Center for Intelligent Chips and Devices, Zhejiang Lab, Hangzhou 311121, China
2. State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
Funder
China Postdoctoral Science Foundation
Major Scientific Project of Zhejiang Laboratory
National Natural Science Foundation of China
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.2c08063
Reference49 articles.
1. Scalable submicrometer additive manufacturing
2. Ultrafast multi-focus 3-D nano-fabrication based on two-photon polymerization
3. Two-photon polymerization microfabrication of hydrogels: an advanced 3D printing technology for tissue engineering and drug delivery
4. Stress-strain response of polymers made through two-photon lithography: Micro-scale experiments and neural network modeling
5. High‐Resolution 3D Printed Photonic Waveguide Devices
Cited by 18 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Defocus compensation scheme for femtosecond laser direct writing of large-area non-periodic micro-structures;Optics and Lasers in Engineering;2024-01
2. Effect of substituents on the performance of N-carbazolyl double benzylidene ketones in visible/NIR light one/two-photon polymerization;European Polymer Journal;2024-01
3. Sub-diffraction optical beam lithography based on a center-non-zero depletion laser;Optics Letters;2023-12-21
4. Three-dimensional nanoscale vortex line visualization and chiral nanostructure fabrication of tightly focused multi-vortex beams via direct laser writing;Photonics Research;2023-12-21
5. Subdiffraction 3D Nanolithography by Two‐Photon Two‐Step Absorption and Photoinhibition;Laser & Photonics Reviews;2023-12-10
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3