Nonlinear Model Identification for Temperature Control in Single Wafer Rapid Thermal Processing
Author:
Affiliation:
1. Department of Chemical Engineering, University of Texas, Austin, Texas 78712
2. Department of Chemical Engineering, Kyungpook National University, Taegu 702-701, Korea
Publisher
American Chemical Society (ACS)
Subject
Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ie071378%2B
Reference15 articles.
1. Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities
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5. Adaptive control approach of rapid thermal processing
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