Atomic Layer Deposition of Ir−Pt Alloy Films
Author:
Affiliation:
1. Energy Systems Division, Argonne National Laboratory, Argonne, Illinois 60439
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm9031978
Reference48 articles.
1. Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition
2. Suntola, T.; Jorma, A.Method for Producing Compound Thin Films. U.S. Patent 4,058,430, 1977.
3. Controlled growth of antimony-doped tin dioxide thin films by atomic layer epitaxy
4. Atomic layer epitaxy of ZnS:Tb thin film electroluminescent devices
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