1. Institute of Quantum Optics, Leibniz University Hannover, Welfengarten 1, 30167, Hannover, Germany
2. Cluster of Excellence PhoenixD (Photonics, Optics, and Engineering-Innovation Across Disciplines), 30167, Hannover, Germany
3. Hochschule Bremen City University of Applied Sciences, Neustadtswall 30, 28199 Bremen, Germany
4. Max Born Institute, Max-Born-Straße 2A, 12489 Berlin, Germany
5. Centre for Nano Optics, University of Southern Denmark, 5230 Odense, Denmark
6. JCMwave GmbH, Bolivarallee 22, 14050 Berlin, Germany
7. Zuse Institute Berlin, Takustr. 7, 14195 Berlin, Germany
8. Department of Photonics Engineering, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark
9. National Centre for Micro- and Nano-Fabrication, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark