1. AMO GmbH, Advanced Microelectronic Center Aachen (AMICA), Otto-Blumenthal-Str. 25, 52074 Aachen, Germany
2. RWTH Aachen University, Chair of Electronic Devices, Otto-Blumenthal-Str. 2, 52074 Aachen, Germany
3. RWTH Aachen University, Compound Semiconductor Technology, Sommerfeldstr. 18, 52074 Aachen, Germany
4. University of Siegen, School of Science and Technology, Hölderlinstr. 3, 57076 Siegen, Germany
5. Raith B.V., De Dintel 27A, 5684 PS Best, The Netherlands
6. AIXTRON SE, Dornkaulstr. 2, 52134 Herzogenrath, Germany
7. University of Wuppertal, Chair of Smart Sensor Systems, 42285 Wuppertal, Germany