Mitigation of UV-Induced Propagation Loss in PECVD Silicon Nitride Photonic Waveguides
Author:
Affiliation:
1. Imec, Kapeldreef 75, 3001 Leuven, Belgium
2. KU Leuven, Department of Physics, Celestijnenlaan 200D, 3001 Leuven, Belgium
Funder
miDiagnostics
Publisher
American Chemical Society (ACS)
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Biotechnology,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/acsphotonics.8b00014
Reference25 articles.
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4. Surface Enhanced Raman Spectroscopy Using a Single Mode Nanophotonic-Plasmonic Platform
5. Bright and dark plasmon resonances of nanoplasmonic antennas evanescently coupled with a silicon nitride waveguide
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