Direct Monitoring of Nanoscale Deformations across All Layers in Three-Dimensional Stacked Structures

Author:

Zhao Xiangyu1ORCID,Jiang Hao12ORCID,Liu Jiamin1,Liu Changqing1,Deng Hui3ORCID,Zhou Renjie4ORCID,Fang Nicholas X.5,Liu Shiyuan12ORCID,Zhu Jinlong162ORCID

Affiliation:

1. State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China

2. Optics Valley Laboratory, Wuhan, Hubei 430074, China

3. Department of Mechanical and Energy Engineering, Southern University of Science and Technology, No. 1088, Xueyuan Road, Shenzhen, Guangdong 518055, China

4. Department of Biomedical Engineering, The Chinese University of Hong Kong, Shatin, New Territories, Hong Kong, China

5. Department of Mechanical Engineering, University of Hong Kong, Hong Kong, China

6. Research Institute of Huazhong University of Science and Technology Shenzhen, Shenzhen 518057, China

Funder

National Key Research and Development Program of China

Shenzhen Municipal Fundamental Research Program

National Natural Science Foundation of China

Optics Valley Laboratory

Hubei Province

Guangdong-Hong Kong Technology Cooperation Funding Scheme Category C Platform

Publisher

American Chemical Society (ACS)

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