1. Light Technology Institute (LTI), Karlsruhe Institute of Technology (KIT), Kaiserstraße 12, D-76131 Karlsruhe, Germany
2. Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, D-76344 Eggenstein-Leopoldshafen, Germany
3. Institute of Micro- and Nanoelectronic
Systems (IMS), Karlsruhe Institute of Technology (KIT), Hertzstraße
16, D-76187 Karlsruhe, Germany