Nanoscale Plasmonic Stamp Lithography on Silicon
Author:
Affiliation:
1. Department of Chemistry, University of Alberta, 11227 Saskatchewan Drive, Edmonton, AB T6G 2G2, Canada
2. National Institute for Nanotechnology, National Research Council Canada, 11421 Saskatchewan Drive, Edmonton, AB T6G 2M9, Canada
Funder
Canada Foundation for Innovation
Natural Sciences and Engineering Research Council of Canada
Alberta Innovates - Technology Futures
Publisher
American Chemical Society (ACS)
Subject
General Physics and Astronomy,General Engineering,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsnano.5b00312
Reference81 articles.
1. Soft lithography for micro- and nanoscale patterning
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5. Nanopatterning by block copolymer micelle nanolithography and bioinspired applications
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