Patterning and Templating for Nanoelectronics-Reference-Cited by-同舟云学术

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Patterning and Templating for Nanoelectronics

Published:2010-02-09 Issue:6 Volume:22 Page:769-778
ISSN:0935-9648
Container-title:Advanced Materials
language:en
Short-container-title:Adv. Mater.

Author:

Galatsis Kosmas,Wang Kang L.,Ozkan Mihri,Ozkan Cengiz S.,Huang Yu,Chang Jane P.,Monbouquette Harold G.,Chen Yong,Nealey Paul,Botros Youssry

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference36 articles.

1. Semiconductor Industry Association (SIA), International Technology Roadmap for Semiconductors 2007, www.itrs.net (last accessed October 2009).

2. Ultrahigh density data storage from local polymerization by a scanning tunneling microscope

3. Electron beam lithography—Resolution limits

4. Electrochemical Nanoimprinting with Solid-State Superionic Stamps

5. Biomolecular Nanopatterning by Electrophoretic Printing Lithography

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