Quantitative Three-Dimensional Characterization of Block Copolymer Directed Self-Assembly on Combined Chemical and Topographical Prepatterned Templates
Author:
Affiliation:
1. Institute for Molecular Engineering, University of Chicago, 5640 South Ellis Avenue, Chicago, Illinois 60637, United States
2. Department of Chemical Engineering, Technion − Institute of Technology, Haifa 3200003, Israel
Funder
National Institute of Standards and Technology
Basic Energy Sciences
Taub Foundation
Publisher
American Chemical Society (ACS)
Subject
General Physics and Astronomy,General Engineering,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsnano.6b05657
Reference52 articles.
1. Pitch doubling through dual-patterning lithography challenges in integration and litho budgets
2. Sidewall spacer quadruple patterning for 15nm half-pitch
3. Transfer of self-aligned spacer patterns for single-digit nanofabrication
4. Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
5. Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates
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