1. Electron Spectrometry and Microscopy Laboratory (LSME), Institute of Physics (IPHYS), École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
2. Microsystems Laboratory (LMIS1), Microengineering Institute (IMT), École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
3. SIMUSERV GmbH, Friedrich-Bergius-Ring 15, 97076 Würzburg, Germany