Electrodissolution and Passivation of Silicon in Aqueous Alkaline Media: A Voltammetric and Impedance Investigation
Author:
Affiliation:
1. Istituto di Polarografia ed Elettrochimica Preparativa del C. N. R., Corso Stati Uniti 4, 35100 Padova, Italy
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Surfaces, Coatings and Films,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp982462t
Reference30 articles.
1. Fabrication of Vertical Sidewalls by Anisotropic Etching of Silicon (100) Wafers
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4. A Raman Study of Etching Silicon in Aqueous KOH
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