Rapid and Selective Deposition of Patterned Thin Films on Heterogeneous Substrates via Spin Coating-Reference-Cited by-同舟云学术

Rapid and Selective Deposition of Patterned Thin Films on Heterogeneous Substrates via Spin Coating

Published:2019-05-22 Issue:23 Volume:11 Page:21177-21183
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Zhang Yuanyi^ORCID,D’Ambra Colton A.,Katsumata Reika^ORCID,Burns Ryan L.¹,Somervell Mark H.¹,Segalman Rachel A.^ORCID,Hawker Craig J.^ORCID,Bates Christopher M.^ORCID

Affiliation:

1. Tokyo Electron U.S. Holdings, Inc., Austin, Texas 78741, United States

Funder

Semiconductor Research Corporation

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.9b05190

Reference39 articles.

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