1. Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Materials Science and Engineering, Dalian University of Technology, 2 Linggong Road, Dalian 116024, China
2. Geneus Technologies (Chengdu) Co., Ltd., 88 Keyuan South Road, Chengdu 610041, China
3. Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, 2 Linggong Road, Dalian 116024, China