On-chip and freestanding elastic carbon films for micro-supercapacitors-Reference-Cited by-同舟云学术

On-chip and freestanding elastic carbon films for micro-supercapacitors

Published:2016-02-12 Issue:6274 Volume:351 Page:691-695
ISSN:0036-8075
Container-title:Science
language:en
Short-container-title:Science

Author:

Huang P.¹²,Lethien C.²³,Pinaud S.⁴,Brousse K.¹²,Laloo R.¹²,Turq V.¹²,Respaud M.⁴⁵,Demortière A.²⁶,Daffos B.¹²,Taberna P. L.¹²,Chaudret B.⁴,Gogotsi Y.⁷,Simon P.¹²

Affiliation:

1. Université Paul Sabatier-Toulouse III, Laboratoire Centre Inter-universitaire de Recherche et d’Ingénierie des Matériaux (CIRIMAT), UMR CNRS 5085, 118 route de Narbonne, 31062 Toulouse, France.

2. Réseau sur le Stockage Electrochimique de l’Energie, FR CNRS n°3459, France.

3. Université Lille 1 Sciences et Technologies, Laboratoire Institut d’Electronique de Microélectronique et de Nanotechnologie (IEMN), UMR CNRS 8520, Cité scientifique, Avenue Henri Poincaré, CS 60069, 59652 Villeneuve d’Ascq cedex, France.

4. Laboratoire de Physique et Chimie des Nano-Objets (LPCNO), UMR 5215 Institut National des Sciences Appliquées (INSA)–Université Paul Sabatier (UPS)–CNRS, Université de Toulouse, INSA, 135 Avenue de Rangueil, 31077 Toulouse, France.

5. Atelier Interuniversitaire de Micro-nano Électronique (AIME), Université de Toulouse, INSA, UPS, INP, 135 avenue de Rangueil, 31077 Toulouse Cedex 4, France.

6. Laboratoire de Chimie et de Réactivité des Solides, UMR CNRS 7314, Université de Picardie Jules Verne, 80039 Amiens, France.

7. Department of Materials Science and Engineering, and A. J. Drexel Nanomaterials Institute, Drexel University, 3141 Chestnut Street, Philadelphia, PA 19104, USA.

Abstract

Flexible power for flexible electronics A challenge for flexible electronics is to couple devices with power sources that are also flexible. Ideally, they could also be processed in a way that is compatible with current microfabrication technologies. Huang et al. deposited a relatively thick layer of TiC on top of an oxide-coated Si film. After chlorination, most, but importantly not all, of the TiC was converted into a porous carbon film that could be turned into an electrochemical capacitor. The carbon films were highly flexible, and the residual TiC acted as a stress buffer with the underlying Si film. The films could be separated from the Si to form free-floating films, with the TiC providing a support layer. Science , this issue p. 691

Funder

Agence Nationale de la Recherche (ANR)

European Research Council

Fluid Interface Reactions, Structures and Transport (FIRST) Center

U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

Reference51 articles.

1. Capacitive energy storage in micro-scale devices: recent advances in design and fabrication of micro-supercapacitors

2. Materials for electrochemical capacitors