Controlled Electrochemical Formation of GexSbyTez using Atomic Layer Deposition (ALD)
Author:
Affiliation:
1. Department of Chemistry, The University of Georgia, Athens, Georgia 30602, United States
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm102672j
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