Generation of 30−50 nm Structures Using Easily Fabricated, Composite PDMS Masks
Author:
Affiliation:
1. Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, Massachusetts 02138-2902
Publisher
American Chemical Society (ACS)
Subject
Colloid and Surface Chemistry,Biochemistry,General Chemistry,Catalysis
Link
https://pubs.acs.org/doi/pdf/10.1021/ja0209464
Reference11 articles.
1. Emerging Methods for Micro- and Nanofabrication
2. Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithography
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