Atomic Layer Deposition of Sodium Phosphorus Oxynitride: A Conformal Solid-State Sodium-Ion Conductor-Reference-Cited by-同舟云学术

Atomic Layer Deposition of Sodium Phosphorus Oxynitride: A Conformal Solid-State Sodium-Ion Conductor

Published:2020-04-21 Issue:19 Volume:12 Page:21641-21650
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Nuwayhid R. Blake¹^ORCID,Jarry Angelique¹^ORCID,Rubloff Gary W.¹²,Gregorczyk Keith E.¹^ORCID

Affiliation:

1. Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, United States

2. Institute for Systems Research and the Institute for Research in Electronics and Applied Physics, University of Maryland, Collage Park, Maryland 20742, United States

Funder

Basic Energy Sciences

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.0c03578

Reference66 articles.

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