Large Piezoelectric Response and Ferroelectricity in Li and V/Nb/Ta Co-Doped w-AlN
Author:
Affiliation:
1. Tyndall National Institute, Lee Maltings, Dyke Parade, University College Cork, Cork T12 R5CP, Ireland
2. NIBEC, School of Engineering, Ulster University, Shore Road, Antrim BT37 0QB, Northern Ireland
Funder
Science Foundation Ireland
European Regional Development Fund
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.0c19620
Reference60 articles.
1. Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators
2. Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films
3. Integrated high frequency aluminum nitride optomechanical resonators
4. Rinaldi, M.; Zuniga, C.; Zuo, C.; Piazza, G. In Super-high-frequency Two-port AlN Contour-mode Resonators for RF Applications, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2010; Vol. 57, pp 38–45.
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