Thermoelastic and Optical Properties of Thick Boride Templates on Silicon for Nitride Integration Applications
Author:
Affiliation:
1. Department of Chemistry and Biochemistry, Arizona State University, Tempe, Arizona 85287; Department of Physics, Arizona State University, Tempe, Arizona 85287; and Freescale Semiconductor, Tempe, Arizona 85284
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm702547p
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