Controlled Fabrication of Silicon Nanowires by Electron Beam Lithography and Electrochemical Size Reduction
Author:
Affiliation:
1. Laboratory of Materials and Semiconductor Physics, Royal Institute of Technology, Electrum 229, SE-164 40 Kista, Sweden
Publisher
American Chemical Society (ACS)
Subject
Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering
Link
https://pubs.acs.org/doi/pdf/10.1021/nl0481573
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