Self‐limiting oxidation for fabricating sub‐5 nm silicon nanowires
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.111914
Reference10 articles.
1. Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers
2. Oxidation of sub-50 nm Si columns for light emission study
3. Synthesis of luminescent silicon clusters by spark ablation
4. The Oxidation of Shaped Silicon Surfaces
5. Two-dimensional thermal oxidation of silicon. II. Modeling stress effects in wet oxides
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