1. State Key Laboratory for Manufacturing Systems Engineering, The Key Laboratory of Biomedical Information Engineering of Ministry of Education, Center for Mitochondrial Biology and Medicine, School of Life Science and Technology, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Key Laboratory for Biomedical Testing and High-End Equipment, Xi’an Jiaotong University, Xi’an 710049, Shannxi, P. R. China
2. State Key Laboratory for Manufacturing Systems Engineering, Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, Engineering Research Center of Spin Quantum Sensor Chips, Universities of Shaanxi Province, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, P. R. China
3. State Key Laboratory for Manufacturing Systems Engineering, School of Instrument Science and Technology, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Key Laboratory for Biomedical Testing and High-End Equipment, Xi’an Jiaotong University, Xi’an 710054, P. R. China
4. State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong University, Xi’an 7100049, Shaanxi, P. R. China