Ultrastable 3D Heterogeneous Integration via N-Heterocyclic Carbene Self-Assembled Nanolayers-Reference-Cited by-同舟云学术

Ultrastable 3D Heterogeneous Integration via N-Heterocyclic Carbene Self-Assembled Nanolayers

Published:2024-06-27 Issue:27 Volume:16 Page:35505-35515
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Lee Jinhyoung¹²,Woo Gunhoo³⁴,Lee Gyuyoung¹,Jeon Jongyeong¹,Lee Seunghwan¹,Wang Ziyang¹,Shin Hyelim⁵,Lee Gil-Woo¹⁶,Kim Yeon-Ji¹⁶,Lee Do-Hyun¹⁶,Kim Min-Jae³⁴,Kim Eungchul⁷,Seok Hyunho³⁴^ORCID,Cho Jinill¹,Kang Boseok³⁴⁸^ORCID,No You-Shin⁶^ORCID,Jang Won-Jun²⁹,Kim Taesung¹³⁴⁵⁸^ORCID

Affiliation:

1. School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, Republic of Korea

2. Center for Quantum Nanoscience, Institute for Basic Science (IBS), Seoul 03760, Republic of Korea

3. SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea

4. Department of Nano Science and Technology, Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea

5. Department of Semiconductor Convergence Engineering, Suwon-si, Gyeonggi-do 16419, Republic of Korea

6. Department of Physics, Konkuk University, Seoul 05029, Republic of Korea

7. AVP Process Development Team, Samsung Electronics, Chungcheongnam-do, Cheonan-si 31086, South Korea

8. Department of Nano Engineering, Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea

9. Department of Physics, Ewha Womans University, Seoul 03760, Republic of Korea

Funder

Korea Semiconductor Research Consortium

National Research Foundation of Korea

Institute for Basic Science

Korea Evaluation Institute of Industrial Technology

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.4c04665

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