1. Tianjin Key Laboratory of Film Electronic & Communication Devices, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin 300384, China
2. School of Materials Science and Engineering, Tianjin University of Technology, Tianjin 300384, China
3. Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, Beijing Information Science and Technology University, Beijing 100192, China
4. Beijing National Research Center for Information Science and Technology, Institute of Microelectronics, Tsinghua University, Beijing 100084, China
5. Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China