An Ultraviolet-Curable Mold for Sub-100-nm Lithography
Author:
Affiliation:
1. Minuta Tech, Center for Biotechnology Incubating, Shillim-dong, Kwanak-Gu, Seoul 151-742, Korea, and School of Chemical Engineering, Seoul National University, Seoul 151-744, Korea
Publisher
American Chemical Society (ACS)
Subject
Colloid and Surface Chemistry,Biochemistry,General Chemistry,Catalysis
Link
https://pubs.acs.org/doi/pdf/10.1021/ja048972k
Reference19 articles.
1. Asteroid Searchers Streak Ahead
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3. Semiconductor Lithography
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